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| 005 | 20150326090000.0 | ||
| 002 | 000027 | ||
| 020 | |a 0201444947 | ||
| 090 | 0 | 0 | |a TK7874 |b J34 2002 |
| 100 | 0 | |a Jaeger | |
| 245 | 0 | 0 | |a Introduction to microelectronic fabrication |c Richard C. Jaeger |
| 250 | |a 2nd ed | ||
| 260 | |a New Jersey: |b Prentice-Hall Inc, |c 2002 | ||
| 300 | |a xiv,316p; |c 24cm | ||
| 490 | 0 | |a Volume V | |
| 504 | |a Includes bibliograpical references and index | ||
| 650 | 0 | 0 | |a Integrated circuits |x Design and contruction |
| 999 | 0 | 0 | |a 000068 |
| 999 | 0 | 0 | |a 000069 |
| 999 | 0 | 0 | |a 000070 |
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