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00659pamja2200169 4500 |
001 |
0000031805_0009 |
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20150305090000.0 |
020 |
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|a 9780470919392 (acid-free paper)
|
090 |
0 |
0 |
|a TK7875
|b .M533 2012
|
245 |
0 |
0 |
|a Micro and smart systems :
|b technology and modeling
|c G.K. Ananthasuresh ... [et al.]..
|
260 |
|
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|a Hoboken, NJ:
|b John Wiley and Sons,
|c c2012..
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300 |
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|a xxi, 474 p.:
|b ill.;
|c 27 cm..
|
504 |
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|a Includes bibliographical references and index.
|
650 |
|
0 |
|a Microelectromechanical systems
|x Design and construction.
|
650 |
|
0 |
|a Intelligent control systems
|x Design and construction.
|
700 |
1 |
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|a Ananthasuresh, G. K.
|
999 |
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|a 0000035537
|