Micro and smart systems : technology and modeling

Other Authors: Ananthasuresh, G. K.
Format: Open Shelf
Published: Hoboken, NJ: John Wiley and Sons, c2012..
Subjects:
LEADER 00659pamja2200169 4500
001 0000031805_0009
005 20150305090000.0
020 |a 9780470919392 (acid-free paper)  
090 0 0 |a TK7875   |b .M533 2012 
245 0 0 |a Micro and smart systems :   |b technology and modeling   |c G.K. Ananthasuresh ... [et al.].. 
260 |a Hoboken, NJ:   |b John Wiley and Sons,   |c c2012.. 
300 |a xxi, 474 p.:   |b ill.;   |c 27 cm.. 
504 |a Includes bibliographical references and index. 
650 0 |a Microelectromechanical systems   |x Design and construction.  
650 0 |a Intelligent control systems   |x Design and construction.  
700 1 |a Ananthasuresh, G. K.  
999 |a 0000035537