Introduction to semiconductor manufacturing technology
| Main Author: | Hong Xiao |
|---|---|
| Format: | Open Shelf |
| Published: |
Upper Saddle River:
Prentice Hall,
c2001.
|
| Subjects: |
| LEADER | 00603pamja2200193 4500 | ||
|---|---|---|---|
| 001 | 0000026282_0009 | ||
| 005 | 20161117090000.0 | ||
| 002 | 0000001000 | ||
| 008 | 120210 | ||
| 020 | |a 0131911368 | ||
| 090 | 0 | 0 | |a TK7871.85 |b .H662 2001 |
| 100 | 1 | |a Hong Xiao | |
| 245 | 1 | 0 | |a Introduction to semiconductor manufacturing technology |c Hong Xiao. |
| 260 | |a Upper Saddle River: |b Prentice Hall, |c c2001. | ||
| 300 | |a viii, 647 p.: |b ill.; |c 24 cm. | ||
| 504 | |a Includes bibliographical references and index | ||
| 650 | 0 | |a Semiconductor industry | |
| 650 | 0 | |a Semiconductors |x Design and construction | |
| 999 | |a 0000031172 | ||