Introduction to semiconductor manufacturing technology
| Main Author: | Hong Xiao |
|---|---|
| Format: | Open Shelf |
| Published: |
Upper Saddle River:
Prentice Hall,
c2001.
|
| Subjects: |
| Physical Description: |
viii, 647 p.: ill.; 24 cm. |
|---|---|
| Bibliography: |
Includes bibliographical references and index |
| ISBN: |
0131911368 |