MEMS & microsystems : design and manufacture
| Main Author: | Hsu, Tai-Ran. |
|---|---|
| Format: | Open Shelf |
| Published: |
New York:
The McGraw-Hill Companies, Inc,
2002
|
| Subjects: |
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|---|---|---|---|
| 001 | 0000024559_0012 | ||
| 005 | 20151124090000.0 | ||
| 002 | 000002810 | ||
| 020 | |a 0071204768 | ||
| 090 | 0 | 0 | |a TK7874. |b H794 2002 |
| 100 | 1 | |a Hsu, Tai-Ran. | |
| 245 | 0 | 0 | |a MEMS & microsystems : |b design and manufacture |c Ta-Ran Hsu |
| 260 | |a New York: |b The McGraw-Hill Companies, Inc, |c 2002 | ||
| 300 | |a xii,436 p.; |c 24 cm. | ||
| 504 | |a Includes index. | ||
| 650 | 0 | 0 | |a Microelectronics |
| 650 | 0 | 0 | |a Microelectromechanical systems |
| 650 | 0 | 0 | |a Microelectronic packaging |
| 999 | |a 0000028636 | ||
| 999 | |a 0000052050 | ||