MEMS & microsystems : design and manufacture
| Main Author: | Hsu, Tai-Ran. |
|---|---|
| Format: | Open Shelf |
| Published: |
New York:
The McGraw-Hill Companies, Inc,
2002
|
| Subjects: |
| Physical Description: |
xii,436 p.; 24 cm. |
|---|---|
| Bibliography: |
Includes index. |
| ISBN: |
0071204768 |