Introduction to semiconductor manufacturing technology
| Main Author: | Xiao, Hong. |
|---|---|
| Format: | Open Shelf |
| Published: |
Upper Saddle River, N.J:
Prentice-Hall Inc,
2001
|
| Series: |
International edition
|
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| 001 | 0000023028_0012 | ||
| 005 | 20151002090000.0 | ||
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| 020 | |a 0131911368 | ||
| 090 | 0 | 0 | |a TS7871.85. |b X53 2001 |
| 100 | 1 | |a Xiao, Hong. | |
| 245 | 0 | 0 | |a Introduction to semiconductor manufacturing technology |c Hong Xiao. |
| 260 | |a Upper Saddle River, N.J: |b Prentice-Hall Inc, |c 2001 | ||
| 300 | |a xiii,647p.; |c 23cm. | ||
| 490 | 0 | |a International edition | |
| 999 | |a 0000026562 | ||
| 999 | |a 0000051472 | ||