Introduction to semiconductor manufacturing technology
| Main Author: | Xiao, Hong. |
|---|---|
| Format: | Open Shelf |
| Published: |
Upper Saddle River, N.J:
Prentice-Hall Inc,
2001
|
| Series: |
International edition
|
| Physical Description: |
xiii,647p.; 23cm. |
|---|---|
| ISBN: |
0131911368 |